3C-SiC 4H-SiC 4H-SiC, epitaxial layer 6H-SiC Berkovich indenter Engineering FEM History MEA MEMS devices MESFET PAE Raman spectroscopy Rutherford backscattering spectrometry (RBS) Schottky barrier SiC SiC power electronic devices Technology Young's modulus aluminum nitride amorphous SiC bulge test bulk micromachining circular membrane cleavage strength critical depth of cut critical load deep level transient spectroscopy (DLTS) deformation doped SiC