3C-SiC 1 4H-SiC 1 4H-SiC, epitaxial layer 1 6H-SiC 1 Berkovich indenter 1 Engineering 1 FEM 1 History 1 MEA 1 MEMS devices 1 MESFET 1 PAE Raman spectroscopy 1 Rutherford backscattering spectrometry (RBS) 1 Schottky barrier 1 SiC 1 SiC power electronic devices 1 Technology 1 Young's modulus 1 aluminum nitride 1 amorphous SiC 1 bulge test 1 bulk micromachining 1 circular membrane 1 cleavage strength 1 critical depth of cut 1 critical load 1 deep level transient spectroscopy (DLTS) 1 deformation 1 doped SiC 1