4H-SiC 2 MESFET 1T DRAM 1 3C-SiC 1 4H-SiC, epitaxial layer 1 6H-SiC 1 AlGaN/GaN 1 AlGaN/GaN HEMT 1 Berkovich indenter 1 DIBL effect 1 Engineering 1 FEM 1 GaN 1 GaN high electron mobility transistor (HEMT) 1 History 1 I-V kink effect 1 Ku-band 1 MEA 1 MEMS devices 1 PAE 1 Raman spectroscopy 1 Rutherford backscattering spectrometry (RBS) 1 Schottky barrier 1 SiC 1 SiC power electronic devices 1 T-anode 1 TCAD 1 Technology 1 W band 1 Young's modulus 1