Microfabrication via Photolithography
The fabrication of BioMEMs devices is often done using a microfabrication technique called photolithography. This widely used method utilizes light to transfer a pattern onto a silicon wafer, and provides the basis for the fabrication of many types of BioMEMs devices. This video presents the photoli...
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| Idioma: | Inglés |
| Publicado: |
Cambridge, MA :
MyJoVE Corp
2016.
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| Colección: | JOVE Science Education.
Bioengineering. |
| Acceso en línea: | Acceso a vídeo desde UNAV |
| Ver en Universidad de Navarra: | https://innopac.unav.es/record=b42112849*spi |
| Sumario: | The fabrication of BioMEMs devices is often done using a microfabrication technique called photolithography. This widely used method utilizes light to transfer a pattern onto a silicon wafer, and provides the basis for the fabrication of many types of BioMEMs devices. This video presents the photolithography technique, shows how the process is performed in the clean room, and introduces some applications of the process. |
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| Notas: | Tít. sacado de la página de descripción del recurso. |
| Descripción Física: | 1 recurso electrónico (463 seg.) : son., col |
| Formato: | Forma de acceso: World Wide Web. |
| Público: | Para estudiantes universitarios, graduados y profesionales. |
