Handbook of silicon based MEMS materials and technologies
A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications. . Key topics covered include: .: . .; Silicon as MEMS material .; Material properties and measurement techniques .; Analytical method...
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| Formato: | Libro electrónico |
| Idioma: | Inglés |
| Publicado: |
Amsterdam ; Boston :
William Andrew/Elsevier
2010.
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| Edición: | 1st ed |
| Colección: | EBSCO Academic eBook Collection Complete.
Micro and nano technologies. |
| Acceso en línea: | Conectar con la versión electrónica |
| Ver en Universidad de Navarra: | https://innopac.unav.es/record=b33603212*spi |
| Sumario: | A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications. . Key topics covered include: .: . .; Silicon as MEMS material .; Material properties and measurement techniques .; Analytical methods used in materials characterization .; Modeling in MEMS .; Measuring MEMS .; Micromachining technologies in MEMS .; Encapsulation of MEMS components .; Emerging process technologies, including ALD and porous silicon ... Written by 73 world class MEMS contributors from around the glo. |
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| Descripción Física: | xxxii, 636 p. : il |
| Formato: | Forma de acceso: World Wide Web. |
| Bibliografía: | Incluye referencias bibliográficas e índice. |
| ISBN: | 9780080947723 |
