Handbook of VLSI microlithography principles, technology, and applications
This handbook gives readers a look at the technology of printing very high resolution and high density integrated circuit (IC) patterns into thin resist process transfer coatings - including optical lithography, electron beam, ion beam, and X-ray lithography. The book's main theme is the specia...
| Otros Autores: | |
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| Formato: | Libro electrónico |
| Idioma: | Inglés |
| Publicado: |
Park Ridge, N.J. : Norwich, N.Y. :
Noyes Publications ; William Andrew Pub
2001.
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| Edición: | 2nd ed |
| Colección: | Materials science and process technology series. Electronic materials and process technology.
Science Direct e-books. |
| Acceso en línea: | Conectar con la versión electrónica |
| Ver en Universidad de Navarra: | https://innopac.unav.es/record=b25440767*spi |
Tabla de Contenidos:
- Issues and Trends Affecting Lithography Tool Selection Strategy
- Resist Technology: Design, Processing and Applications
- Lithography Process Monitoring and Defect Detection
- Techniques and Tools for Photo Metrology
- Techniques and Tools for Optical Lithography
- Microlithography Tool Automation
- Electron Beam ULSI Applications
- Rational Vibration and Structural Dynamics for Lithographic Tool Installations
- Applications of Ion Microbeam Lithography and Direct Processing
- X-Ray Lithography.
