Nano- and microelectromechanical systems fundamentals of nano- and microengineering
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| Formato: | Libro |
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Boca Raton :
CRC Press
c2001.
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| Colección: | Nano- and microscience, engineering, technology, and medicine series
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| Materias: | |
| Ver en Universidad de Navarra: | https://innopac.unav.es/record=b24856691*spi |
| Descripción Física: | 338 p. : il. ; 25 cm |
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