Photoresist Use in Semiconductor Manufacturing

Photoresist Use in Semiconductor Manufacturing

This OECD Emission Scenario Document (ESD) provides information on the sources, use patterns, and potential release pathways of chemicals used in the semiconductor manufacturing industry. The document presents standard approaches for estimating environmental releases of and occupational exposures to...

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Detalles Bibliográficos
Autor principal: Organisation for Economic Co-operation and Development.
Autores Corporativos: Organisation for Economic Co-operation and Development (-), Organisation for Economic Co-operation and Development Contributor (contributor), Organisation for Economic Co-operation and Development Content Provider (content provider)
Formato: Libro electrónico
Idioma:Inglés
Publicado: Paris : OECD Publishing 2014.
Colección:Series on Emission Scenario Documents, no.9.
Materias:
Power semiconductors
Ver en Biblioteca Universitat Ramon Llull:https://discovery.url.edu/permalink/34CSUC_URL/1im36ta/alma991009705866006719
Descripción
Sumario:This OECD Emission Scenario Document (ESD) provides information on the sources, use patterns, and potential release pathways of chemicals used in the semiconductor manufacturing industry. The document presents standard approaches for estimating environmental releases of and occupational exposures to additives and components used in photoresist formulations.  
Notas:Bibliographic Level Mode of Issuance: Monograph
Descripción Física:1 online resource (117 pages)
ISBN:9789264221161

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