Developments in surface contamination and cleaning. Volume 7 : cleanliness validation and verification

Developments in surface contamination and cleaning Volume 7 : cleanliness validation and verification Volume 7 :

As device sizes in the semiconductor industries are shrinking, they become more vulnerable to smaller contaminant particles, and most conventional cleaning techniques employed in the industry are not as effective at smaller scales. The book series Developments in Surface Contamination and Cleaning...

Descripción completa

Detalles Bibliográficos
Otros Autores: Kohli, Rajiv, 1947- author (author), Kohli, Rajiv, editor (editor), Mittal, K. L., editor (contributor), Albert, David E., contributor
Formato: Libro electrónico
Idioma:Inglés
Publicado: Kidlington, England ; Waltham, Massachusetts : William Andrew 2015.
Edición:First edition
Materias:
Surfaces (Technology)
Surface contamination > Prevention.
Ver en Biblioteca Universitat Ramon Llull:https://discovery.url.edu/permalink/34CSUC_URL/1im36ta/alma991009629474106719
Descripción
Sumario:As device sizes in the semiconductor industries are shrinking, they become more vulnerable to smaller contaminant particles, and most conventional cleaning techniques employed in the industry are not as effective at smaller scales. The book series Developments in Surface Contamination and Cleaning as a whole provides an excellent source of information on these alternative cleaning techniques as well as methods for characterization and validation of surface contamination. Each volume has a particular topical focus, covering the key techniques and recent developments in the area. The chapters i
Notas:Description based upon print version of record.
Descripción Física:1 online resource (207 p.)
Bibliografía:Includes bibliographical references at the end of each chapters and index.
ISBN:9780323311458

Ejemplares similares