Nano-lithography
Lithography is an extremely complex tool - based on the concept of "imprinting" an original template version onto mass output - originally using relatively simple optical exposure, masking, and etching techniques, and now extended to include exposure to X-rays, high energy UV light, and el...
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| Formato: | Libro electrónico |
| Idioma: | Inglés |
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London : Hoboken, N.J. :
ISTE ; Wiley
2011.
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| Edición: | 1st edition |
| Colección: | ISTE
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| Ver en Biblioteca Universitat Ramon Llull: | https://discovery.url.edu/permalink/34CSUC_URL/1im36ta/alma991009628173906719 |
| Sumario: | Lithography is an extremely complex tool - based on the concept of "imprinting" an original template version onto mass output - originally using relatively simple optical exposure, masking, and etching techniques, and now extended to include exposure to X-rays, high energy UV light, and electron beams - in processes developed to manufacture everyday products including those in the realms of consumer electronics, telecommunications, entertainment, and transportation, to name but a few. In the last few years, researchers and engineers have pushed the envelope of fields including optics, physics, |
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| Notas: | "Adapted and updated from La nanolithographie published 2010 in France by Hermes Science/Lavoisier"--t.p. verso. |
| Descripción Física: | 1 online resource (353 p.) |
| Bibliografía: | Includes bibliographical references and index. |
| ISBN: | 9781118621707 9781118622582 9781299315587 9781118621622 |
