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MEMS
Technology: general issues
5
History of engineering & technology
3
gas sensor
3
resonator
3
temperature sensor
3
CMOS
2
NEMS
2
PMUT
2
analytical model
2
femtosecond laser
2
frequency tuning
2
gas sensors
2
infrared sensor
2
microactuator
2
microbolometer
2
microfabrication
2
microfluidics
2
microresonator
2
piezoelectric
2
silicon
2
spectroscopy
2
structural health monitoring
2
thermal detector
2
tissue engineering
2
waveguides
2
wideband
2
1-3 composite
1
2D colloidal crystal
1
3D cell culture
1
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1Publicado 2022Libro electrónico
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3Publicado 2021Libro electrónico
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