RF MEMS Switches and Integrated Switching Circuits Design, Fabrication, and Test

Microelectromechanical Systems (MEMS) stand poised for the next major breakthrough in the silicon revolution that began with the transistor in the 1960s and has revolutionized microelectronics. MEMS allow one to not only observe and process information of all types from small scale systems, but also...

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Detalles Bibliográficos
Autor principal: Liu, Ai-Qun (-)
Autor Corporativo: SpringerLink (-)
Formato: Libro electrónico
Idioma:Inglés
Publicado: Boston, MA : Springer US 2010.
Colección:MEMS Reference Shelf ; 5.
Springer eBooks.
Acceso en línea:Conectar con la versión electrónica
Ver en Universidad de Navarra:https://innopac.unav.es/record=b33011230*spi
Tabla de Contenidos:
  • Lateral Series Switches
  • Capacitive Shunt Switches
  • Coplanar Waveguide Transmission Line
  • Single-Pole-Multi-Throw Switching Circuits
  • Tunable Electromagnetic Band Gap Bandstop Filter
  • Tunable Electromagnetic Bandpass Filter and Reconfigurable Circuit
  • Capacitive Switching Bandpass Filters
  • Substrate Transfer Process
  • Surface Planarization Process.