Nanofabrication Techniques and Principles
Intended to update scientists and engineers on the current state of the art in a variety of key techniques used extensively in the fabrication of structures at the nanoscale. The present work covers the essential technologies for creating sub 25 nm features lithographically, depositing layers with n...
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| Otros Autores: | , |
| Formato: | Libro electrónico |
| Idioma: | Inglés |
| Publicado: |
Vienna :
Springer Vienna
2012.
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| Colección: | Springer eBooks.
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| Acceso en línea: | Conectar con la versión electrónica |
| Ver en Universidad de Navarra: | https://innopac.unav.es/record=b32991095*spi |
Tabla de Contenidos:
- 1 Introduction
- Directions in Nanofabrication
- 2 Nanolithography
- Fundamentals of Electron Beam Exposure and Development
- Simulation of Electron Beam Exposure and Resist Processing for Nano-Patterning
- Helium Ion Lithography
- Nanoimprint Technologies
- 3 Deposition at the Nanoscale
- Atomic Layer Deposition for Nanotechnology
- Surface Functionalization in the Nanoscale Domain
- Nanostructures Based on Self-Assembly of Block Copolymers
- Epitaxial Growth of Metals on Semiconductors Via Electrodeposition
- 4 Nanoscale Etching and Patterning
- Chemical Mechanical Polish for Nanotechnology
- Deposition, Milling, and Etching with a Focused Helium Ion Beam
- Laser Nanopatterning
- Templating and Pattern Transfer Using Anodized Nanoporous Alumina/Titania.-.
