Chemical Vapour Deposition An Integrated Engineering Design for Advanced Materials
The rapid advancement in chemical vapour deposition (CVD) technology has reached many fields of application, including thin film coating, microelectronics and communications. Chemical Vapour Deposition: An Integrated Engineering Design for Advanced Materials focuses on the application of this techno...
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| Formato: | Libro electrónico |
| Idioma: | Inglés |
| Publicado: |
London :
Springer London
2010.
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| Colección: | Engineering Materials and Processes.
Springer eBooks. |
| Acceso en línea: | Conectar con la versión electrónica |
| Ver en Universidad de Navarra: | https://innopac.unav.es/record=b32979307*spi |
Tabla de Contenidos:
- to Chemical Vapour Deposition
- Physical Fundamentals of Chemical Vapour Deposition
- Chemical Vapour Deposition Systems Design
- Thermodynamics and Kinetics of Chemical Vapour Deposition
- Chemical Vapour Infiltration
- Microstructure Evolution and Process Control.
