Handbook of VLSI microlithography principles, technology, and applications
This handbook gives readers a close look at the entire technology of printing very high resolution and high density integrated circuit (IC) patterns into thin resist process transfer coatings̮including optical lithography, electron beam, ion beam, and x-ray lithography. The book's main theme is...
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| Otros Autores: | |
| Formato: | Libro electrónico |
| Idioma: | Inglés |
| Publicado: |
Park Ridge, N.J. : Norwich, N.Y. :
Noyes Publications ; William Andrew Pub
c2001.
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| Edición: | 2nd ed |
| Colección: | Materials science and process technology series.
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| Acceso en línea: | Conectar con la versión electrónica |
| Ver en Universidad de Navarra: | https://innopac.unav.es/record=b21427872*spi |
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