Handbook of VLSI microlithography principles, technology, and applications
This handbook gives readers a close look at the entire technology of printing very high resolution and high density integrated circuit (IC) patterns into thin resist process transfer coatings̮including optical lithography, electron beam, ion beam, and x-ray lithography. The book's main theme is...
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| Otros Autores: | |
| Formato: | Libro electrónico |
| Idioma: | Inglés |
| Publicado: |
Park Ridge, N.J. : Norwich, N.Y. :
Noyes Publications ; William Andrew Pub
c2001.
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| Edición: | 2nd ed |
| Colección: | Materials science and process technology series.
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| Acceso en línea: | Conectar con la versión electrónica |
| Ver en Universidad de Navarra: | https://innopac.unav.es/record=b21427872*spi |
Tabla de Contenidos:
- Issues and Trends Affecting Lithography Tool Selection Strategy
- Resist Technology: Design, Processing and Applications
- Lithography Process Monitoring and Defect Detection
- Techniques and Tools for Photo Metrology
- Techniques and Tools for Optical Lithography
- Microlithography Tool Automation
- Electron Beam ULSI Applications
- Rational Vibration and Structural Dynamics for Lithographic Tool Installations
- Applications of Ion Microbeam Lithography and Direct Processing
- X-Ray Lithography.
