Advances in Unconventional Lithography

The term Lithography encompasses a range of contemporary technologies for micro and nano scale fabrication. Originally driven by the evolution of the semiconductor industry, lithography has grown from its optical origins to demonstrate increasingly fine resolution and to permeate fields as diverse a...

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Detalles Bibliográficos
Otros Autores: Kostovski, Gorgi (Editor ), Kostovski, Gorgi, editor (editor)
Formato: Libro electrónico
Idioma:Inglés
Publicado: Rijeka, Croatia : IntechOpen 2011
2011.
Materias:
Ver en Biblioteca Universitat Ramon Llull:https://discovery.url.edu/permalink/34CSUC_URL/1im36ta/alma991009654667106719
Descripción
Sumario:The term Lithography encompasses a range of contemporary technologies for micro and nano scale fabrication. Originally driven by the evolution of the semiconductor industry, lithography has grown from its optical origins to demonstrate increasingly fine resolution and to permeate fields as diverse as photonics and biology. Today, greater flexibility and affordability are demanded from lithography more than ever before. Diverse needs across many disciplines have produced a multitude of innovative new lithography techniques. This book, which is the final instalment in a series of three, provides a compelling overview of some of the recent advances in lithography, as recounted by the researchers themselves. Topics discussed include nanoimprinting for plasmonic biosensing, soft lithography for neurobiology and stem cell differentiation, colloidal substrates for two-tier self-assembled nanostructures, tuneable diffractive elements using photochromic polymers, and extreme-UV lithography.
Descripción Física:1 online resource (200 pages) : illustrations some color
Bibliografía:Includes bibliographical references.
ISBN:9789535155966
Acceso:Open access